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Environmental Detect and Control SPM

 
 

Temperature and humidity Sensors are embedded in CSPM5500 system,
monitor by LED.

 
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Temperature

Humidity

Range

-55150

0100RH

Resolution

0.01

0.03RH

Accuracy

0.1

0.5RH

Response time

5000ms

4000ms

Non-linearity

±0.18

1RH

Long-time stability

±0.08

1RH

 

   
     
 

Seal-air System can be employed to CSPM5500 for Environmental Control SPM.

 
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Quartz glass window

     

??Specifications:
??* alloy seal cab for disturbance isolation
??* acrylonitrile-butadiene O-ring for better seal
??* Large Quartz glass window for sample board-band ray radiation
??* Adjustable lightening device inside for processing monitor
??* Air inlet-outlet port for environmental control

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Environmental Control SPM

     
 
 

Sample-heating-stage System can be employed to CSPM5500 for sample temperature Control.

 
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Diameter

30mm

Power

6W (Max.)

Temperature

150℃ (Max.)

Accuracy

0.5℃

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Sample-heating-stage System

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